Magnetic Field Sensing Properties of CoFeB-MgO-CoFeB Based Tunneling Magnetoresistance Devices

摘要

We developed spin vale tunneling magnetoresistance devices based on CoFe-MgO-CoFeB materials capable of sensing magnetic field in wide range. The devices offer magnetic field range up to ±100 mT and down to +0.4 mT, nonlinearity of 1 % of full scale and ultra low hysteresis below 0.025 % of full scale. In the largest field range devices show sensitivity up to 0.06 %/mT and hysteresis below 0.025 % of fall scale, while in the lowest field range exhibit sensitivity up to 12 %/mT and hysteresis below 2 % of FS.