Focused electron beam induced processing, a technology to develop and produce miniaturized electron-, IR, THz-, X-ray sources, high resolution detectors and sensors for IR- and X-ray tomography

摘要

FEBIP -focused electron beam induced processing- is a novel technology which renders outstanding advantages compared to other miniaturization techniques, like electron beam lithography, deep X-ray lithography, or 3D construction by optical polymerization. The principle, process characteristics, outstanding results and a variety of possible applications is described.