ACCURATE DETERMINATION OF SPRING CONSTANT OF ATOMIC FORCE MICROSCOPE CANTILEVER AND COMPARISON WITH OTHER METHODS

摘要

In this paper, we describe an atomic force microscope cantilever calibration system consisting of a microbalance and a precision stage. We present new calibration data of two commercial cantilevers showing the application of this system to accurate determination of spring constant of AFM cantilevers or force sensitivity of piezoresistive self-sensing cantilevers with a repeatability of less than 0.7 %.