Reactions between SiCl_4 and NH_3 leading to the formation of silicon nitride powders

摘要

The present work is the first reported analysis ofthe compounds formed during the reaction of SiCl_4 and NH_3in the gas phase at high temperatures and atmospheric pressure.By means of mass spectrometric in-situ measurements it waspossible to detect in the temperature range between 450degCand 900degC the gaseous compounds H_2NSiCl_3,H_2NSiCl_2NH_2, Cl_3SiNHSiCl_3, NH_2Cl_2SiNHSiCl_3,(SiCl_2NH)_3 and Si_3(NH)_3C1_5NH_2. While the formationof linear silazanes is preferred at lower temperatures, increasingtemperatures lead to higher contents of the cyclic compound(SiCl_2NH)_3. It is possible to derive reaction paths resulting inthe formation of solids such as Si_2N_3H, Si_2N_3H_2Cl and ( SiN Cl)_x.