Reactions between SiCl_4 and NH_3 leading to the formation of silicon nitride powders

摘要

The present work is the first reported analysis of the compounds formed during the reaction of SiCl_4 and NH_3 in the gas phase at high temperatures and atmospheric pressure. By means of mass spectrometric in-srtu measurements it was possible to detect in the temperature range between 450℃ and 900℃ the gaseous compounds H_2NSiCl_3, H_2 NSiC_2 NH_2, Cl_3SiNHSiCl_3, NH_2Cl_2SiNHSiCl_3, (SiCl_2NH)_3 and Si_3(NH)_3Cl_5NH_2. While the formation of linear silazanes is preferred at lower temperatures, increasing temperatures lead to higher contents of the cyclic compound (SiCl_2 NH)_3. It is possible to derive reaction paths resulting in the formation of solids such as Si_2N_3H, Si_2N_3H_2Cl and (SiN,Cl)_x.