Highly textured surface ZnO:B-TCO films for solar cells deposited with gradual doping growth technique

摘要

Through combining adjusting film thickness and gradual boron doping growth,highly natively textured surface boron doped zinc oxide (ZnO:B) transparent conducting oxide (TCO) films have been fabricated by using metal organic chemical vapor deposition (MOCVD).Experimental results indicate that thicker films present much larger grain sizes and remarkable higher haze values,whose grains have reached ～600 nm.Typical haze values of ZnO:B films are 68.7％ at 500 nm wavelength and 27％ at 850 nm wavelength,respectively.These highly textured surface ZnO:B films are promising TCO layers applied as substrates for wide-spectrum silicon-based thin film solar cells.