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Optical MCM interconnect using hybrid integration of GaAs optoelectronics with a glass signal routing layer

机译:使用带玻璃信号路由层的GaAs光电子的混合集成光学MCM互连

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In this paper, we present a MCM chip to chip optical interconnect layer in which optoelectronic devices are integrated onto a glass light-guiding substrate. Rather than solder bump bonding, we used the epitaxial lift-off technique for optoelectronic integration. This integration technique facilitates mixed material integration, so that we are able to choose the most cost effective and high performance material for each function in the integration. We report successful integration of emitters and detectors onto a glass substrate, demonstrating that thin-film epitaxial lift-off technology is compatible with the proposed optical interconnect system. An optical interconnection is demonstrated in which light propagating, in both a waveguide mode and substrate modes is routed by a grating to the receiving photodetector.
机译:在本文中,我们将MCM芯片呈现给芯片光学互连层,其中光电器件集成到玻璃光导基板上。我们使用了用于光电集成的外延升降技术而不是焊接凸块键合。这种集成技术有助于混合材料集成,因此我们能够为集成中的每个功能选择最具成本效益和高性能的材料。我们报告了发射器和探测器在玻璃基板上的成功集成,证明薄膜外延升降技术与所提出的光学互连系统相容。在波导模式和基板模式下,通过光栅路由到接收光电探测器的光谱传播光学互连。

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