首页> 外文会议>Electronic Components and Technology Conference, 1995. Proceedings., 45th >Optical MCM interconnect using hybrid integration of GaAs optoelectronics with a glass signal routing layer
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Optical MCM interconnect using hybrid integration of GaAs optoelectronics with a glass signal routing layer

机译:使用GaAs光电与玻璃信号路由层的混合集成的光学MCM互连

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In this paper, we present a MCM chip to chip optical interconnect layer in which optoelectronic devices are integrated onto a glass light-guiding substrate. Rather than solder bump bonding, we used the epitaxial lift-off technique for optoelectronic integration. This integration technique facilitates mixed material integration, so that we are able to choose the most cost effective and high performance material for each function in the integration. We report successful integration of emitters and detectors onto a glass substrate, demonstrating that thin-film epitaxial lift-off technology is compatible with the proposed optical interconnect system. An optical interconnection is demonstrated in which light propagating, in both a waveguide mode and substrate modes is routed by a grating to the receiving photodetector.
机译:在本文中,我们提出了一个MCM芯片到芯片的光学互连层,其中将光电器件集成到玻璃导光基板上。我们使用外延剥离技术进行光电子集成,而不是使用焊料凸点键合。这种集成技术促进了混合材料的集成,因此我们能够为集成中的每个功能选择最具成本效益和高性能的材料。我们报告了将发射器和检测器成功集成到玻璃基板上的事实,表明薄膜外延剥离技术与建议的光学互连系统兼容。演示了一种光学互连,其中以光栅模式传播的光在波导模式和基片模式下都被光栅路由到接收光电探测器。

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