A multimedia expert system for wafer polisher maintenance

摘要

Summary form only given. WESDA is an intelligent diagnostic system that assists in troubleshooting highly complex machines for polishing silicon wafers. Many independent OS/2 applications have been integrated into WESDA to present information in the most effective way possible to users. WESDA's knowledge base is organized in a modular way, and its inference architecture combines problem-solving by classification and by case retrieval. The system has already proved to be very useful for identifying fault components, for recommending whether these should be repaired or replaced, and for advising on tool precision adjustments.