This paper proposes a new interferometer to measure the roughness of optical disk substrates, which applies the principle of shearing interferometry and uses a Faraday modulator to detect the phase between two polarized beams. The instrument can produce surface probe and other statistical data with a height sensitivity of 2 nm and a lateral resolution of 1.2 $mu@m. It has excellent stability even under vibration conditions, and rapid and noncontact measurements can be made without a special reference surface.
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机译：本文提出了一种新的干涉仪来测量光盘基板的粗糙度，其应用剪切干涉测量法的原理，并使用法拉第调制器检测两个偏振光束之间的相位。该仪器可以产生表面探测和其他统计数据，高度灵敏度为2nm，横向分辨率为1.2 $ mu @ m。即使在振动条件下，它具有出色的稳定性，并且可以在没有特殊参考表面的情况下进行快速和非接触测量。
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