Process development for the reproducible roughness measurement of optical surfaces using white light interferometry

摘要

Today a wide range of instruments are available for the rapid roughness quantification of optical surfaces but especially for three dimensional measurement methods no standardized process is established. This leads to different results, even if the same specimen is tested with similar measurement devices. In order to solve this problem an exemplary process development is described in this paper. To do this firstly the term of roughness is defined as a surface deviation and then the functionality and importance of filters in roughness measurement as well as the used measurement devices are described. The following chapter defines the used materials and methods which were used during the measurement process. In the last part of this paper the results are discussed and a process assignment is suggested.