Thermal and structural analysis was carried out to evaluate the thermal distortion of a silicon crystal, which was irradiated by x ray with high intensity. Liquid nitrogen, gallium, and water were considered as coolants in this numerical simulation. These results were applied to the evaluation of a rocking curve. According to the results obtained by using the present model, cooling by liquid nitrogen was the most advantageous in view of the rocking curve when photon energy was under 20 keV. This advantage, however, disappeared gradually as the photon energy was increased to more than 20 keV.
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