Structural characterisation of Nb-doped lead zirconate titanate ferroelectric thin films

摘要

Ferroelectric thin films of Nb-doped rhombohedral Lead Zirconate Titanate (PNZT) sputter deposited and annealed on Pt coated Si substrates were studied. The composition was determined by wavelength dispersive x-ray analysis (WDX). Glancing-angle XRD was used to identify the crystal systems and determine the lattice parameters. The preferred orientation of (101) was observed by both XRD and electron diffraction. Scanning and transmission electron microscopy revealed cracking of the films and grains of 2-5nm in diameter. Mono-domains are suggested as the mechanism for ferroelectricity.