Development of a high-speed high-precision laser plotter

摘要

A high-speed, high-precision laser plotter, the Super Laser Photo Plotter (S-LPP) has been developed. S-LPP has a flat table so that both photographic plates and films can be used, and it is capable of writing fine patterns for print circuit boards (PCBs), lead frames for IC, etc., over the area of 640 mm $MUL 819 mm with a minimum line width of 10 $mu@m in 60 min. It has achieved more than fifty-times faster speed than that of a conventional plotter which has almost the same specifications as S-LPP. Several important optical techniques that have given S-LPP its own features are described.