Photoresist dissolution rates: a comparison of puddle spray and immersion processes

摘要

Design and operation of an on-line Track Development Rate Monitor (TDRM) for track development systems are described. Dissolution data, measured using this equipment, for spray and puddle development processes is presented and compared to those derived from a conventional immersion DRM. Immersion data has traditionally been used to model all development. The validity of this is discussed. Also presented is an off-line technique for evaluating dissolution rates which utilize no specialized DRM equipment. The dissolution rates as measured by this technique are compared with those obtained from the TDRM/DRM methods. Simulations using all the calculated dissolution parameters are compared with SEM cross sections so that a practical evaluation of the various techniques can be made.