Channel-Select RF MEMS Filters Based On Self-Coupled AlN Contour-Mode Piezoelectric Resonators

摘要

This paper reports experimental results on a new class of single-chip multi-frequency channel-select filters based on self-coupled aluminum nitride (AlN) contour-mode piezoelectric resonators. For the first time, two-port AlN contour-mode resonators are connected in series and electrically coupled using their intrinsic capacitance to form multi-frequency (94-271MHz), narrow bandwidth (～0.3%), low insertion loss (～4dB), high off-band rejection (～60dB) and extremely linear (IIP3～110dBm) channel-select filters. This novel technology enables multi-frequency, high-performance and small form factor filter arrays and makes a single-chip multi-band RF solution possible in the near future.