Application of Slanted Finger Inter-digital Transducer SAW Devices to Plural Ultraviolet Photodetectors

摘要

This research introduces plural photodetectors by employing a slanted SAW device with several proximity photoconductive areas. The optical response can be carried out by a photoconductive ZnO overlayer on the LiNbO{sub}3 SAW device. Response of each sensing point can be distinguished according to the corresponding frequency. These devices show high sensitivity and good reproducibility for detecting the intensity of UV light. The 1-point, 2-point and 3-point devices are also applied to construct the power distribution of a light field.