Application of slanted finger interdigital transducer surface acoustic wave devices to ultraviolet array photodetectors

摘要

An ultraviolet array photodetector is developed by the application of a LiNbO_3-based slanted finger interdigital transducer (SFIT) and several ZnO optically active areas. This array photodetector can obtain ultraviolet light intensities within a single measurement. In this analysis, the acoustoelectric interaction between the photogenerated carriers in several active areas and a SFIT surface acoustic wave device is simulated. In the experiment, the photodetector with one to three optically active areas are fabricated. Ultraviolet light with a wavelength of 380 nm and an intensity of 65 μW cm~(-2) is detectable from the photodetector developed in this study. The minimum size of the optically active areas is 0.04 mm~2 that can provide good spatial resolution. The ultraviolet array photodetector is capable of measuring a distributed light field.