Technical Standards, Purifying Methods and Application for Ultrapure Hydrogen

摘要

At present the requirements of ultrapure hydrogen are increasing with the developnment of material industry. The ultrapure hydrogen has been extensively used in produciton fields for semiconductor material, optical fibre, magnetic material, hard alloy, floating glass and catalyst of chemical industry etc. Due to commercial hydrogen puirty is generally up to 99.5-99.9% but the hydrogen purity applied in semiconductor industry is over 99.9999%, therefore the hydrogen finement purifier must be ued for purifying treatment, The past methods of purifying hydrogen were diffusion of palladium alloy membrane, c atalyzing and cryogenic adsorption etc. The method of metal hydride developed in resent years is gradually becoming practical application. The paper introduces various technical standards of ultrapure hydrogen, requirements of hydrogen purity in microelectronic industry and hydrogen purity treated by various fine methods. At the end, the paper describes practical application examples for hdyrogen purifier wiht the methods of metal hydride.