首页> 外文会议>International Conference on Extreme Ultraviolet Lithography >EUV industrialization High Volume Manufacturing with NXE3400B
【24h】

EUV industrialization High Volume Manufacturing with NXE3400B

机译:EUV工业化高批量生产与NXE3400B

获取原文

摘要

"The silicon results from our N7+ today are very encouraging. Volume production will start Q2 next year, that is Q2 2019. We have made ready multiple EUV scanners to support not only the N7+ development, but also N5 development. Our silicon data have proved all the benefits we expect from process simplification with EUV. In addition, we have also started our N3 technology development."
机译:“今天我们的N7 +的硅结果非常令人鼓舞。批量生产将于明年Q2开始,即2019年Q2。我们已经准备好了多个EUV扫描仪,不仅支持N7 +开发,而且还证明了我们的硅数据。我们已证明我们的硅数据我们预期的所有福利与EUV都会简化。此外,我们还开始了我们的N3技术发展。“

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号