It is generally accepted that electromechanical switches have superior off-to-on resistance ratios, very low leakage currents, and sub-threshold slope better than 0.1 mV/decade. It is also well-known that these switches tend to have large foot-print, large turn on voltages, low speeds (at best 0.1 0.01 switching time) and are relatively unreliable and fail due to contact resistance variations, particulates, fatigue, and stiction. Here we present a class of nano-electromechanical switches with -1 V turn-on voltage, very high speed of <1 ns, and very small footprint of around 1 μm~2.
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