Improved infrared (IR) microscope measurements for the micro-electronics industry

摘要

Infrared (IR) measurements of the surface temperature of electronic devices have improved over the last decade. However, to obtain more accurate surface temperatures the devices are often coated with a high emissivity coating leading to temperature averaging across the device surface and damage to the device. This paper will look at the problems of making accurate surface temperature measurements particularly on areas of semiconductor and will address the surface emissivity correction problem using novel measurement approaches.