A small-signal model of a nanoscale MOSFET becomes very important for designing RFICs and characterizing processes and devices. To extract parasitic resistances and inductances, a direct method presented in D. Lovelace et al. (1994) based on S-parameter measurements at zero bias is developed, but the assumption of zero transconductance (ggm) and output conductance (gds) at external Vgs=0V is not valid in real MOSFETs. Thus, Z-parameter extraction equations as stated in D. Lovelace et al. (1994) result in significant error according to the selected frequency range. Another extraction method according to S. Lee (2003) using a linear regression of high-frequency data has been proposed to determine resistances and inductances, but much higher frequency data are required to apply for nanoscale MOSFETs, because of high gm and gds. In this paper, a direct method to extract resistances and inductances of nanoscale MOSFETs is proposed using a linear regression of high-frequency data at zero gate voltage.
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