首页> 外文会议>Electron Devices Meeting, 1998. IEDM '98 Technical Digest., International >Trends in semiconductor equipment, materials, and processingtechnology
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Trends in semiconductor equipment, materials, and processingtechnology

机译:半导体设备,材料和加工的趋势技术

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Today's technological revolution would not be possible without thecontinuing increase in our scientific understanding of materials andphenomena, along with the processing and synthesis, required for highvolume, low cost integrated circuit (IC) manufacturing. The exponentialgrowth in functionality per dollar has been made through steadyincreases in complexity and density of ICs. This high productivitygrowth rate can only continue through increased understanding andcontrol of the materials and processes used to manufacturestate-of-the-art ICs. The suppliers to the semiconductor manufacturingindustry are increasingly developing this knowledge base, along with theequipment required to manufacture future generations of ICs
机译:没有这种技术,今天的技术革命将不可能实现。 我们对材料和材料的科学认识不断提高 现象,以及加工和合成,需要高 大批量,低成本的集成电路(IC)制造。指数的 每美元功能的增长是通过稳定增长实现的。 增加了集成电路的复杂性和密度。如此高的生产率 增长的速度只有通过加深理解才能持续下去, 控制用于制造的材料和过程 最先进的IC。半导体制造的供应商 业界越来越多地开发这种知识库, 制造下一代集成电路所需的设备

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