Advanced 3D Microstructuring for Integrated Silicon Microactuators

摘要

Advanced 3D structuring of silicon is becoming increasingly relevant to realize well dimensioned and accurate elements to increase functionality of micromechanical systems. The developments in dry etching technology combined with the introduction of other materials in silicon-based technology further expands 3D structuring possibilities, thus allowing the realization of novel Si-based microactuators. Micro and nanopositioning devices as well as microgrippers capable of both in-plane and out-of plane motion are good examples of such devices.