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Silicon microstructures and microactuators for compact computer disk drives

机译:紧凑型计算机磁盘驱动器的硅微结构和微致动器

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Advances in VLSI and software technology have been the primary engines for the ongoing information revolution. But the steady stream of technical innovations in magnetic disk recording technology are also important factors contributing to the economic strengths of the computer and information industry. One important technology trend for the disk drive industry has been that of miniaturization. As this trend continues, future disk drives will have the same form factor as VLSIs, storing gigabytes of data. Silicon micromachining technology will play an important role in the fabrication of high-bandwidth servo-controlled microelectromechanical components for future super-compact disk drives. At UCLA and Caltech, for the past two years (1992-94) we have initiated a number of industry-supported joint research projects to develop microstructures and microactuators for future generation super compact magnetic recording rigid disk drives, including one to design and fabricate silicon read/write head microsuspensions with integrated electrical and mechanical interconnects, which target the next generation 30% form factor pico-sliders, and one for electromagnetic piggyback microactuators in super high-track-density applications, both of which utilize state-of-the-art silicon micromachining fabrication techniques.
机译:VLSI和软件技术的进步一直是正在进行的信息革命的主要引擎。但是,磁盘记录技术中源源不断的技术创新也是促进计算机和信息产业经济实力的重要因素。磁盘驱动器行业的一项重要技术趋势是小型化。随着这种趋势的继续,未来的磁盘驱动器将具有与VLSI相同的外形尺寸,可存储千兆字节的数据。硅微加工技术将在制造用于未来超紧凑型磁盘驱动器的高带宽伺服控制微机电组件中发挥重要作用。在过去的两年中(1992-94年),我们在加州大学洛杉矶分校和加州理工学院发起了多个行业支持的联合研究项目,以开发用于下一代超紧凑型磁记录刚性磁盘驱动器的微结构和微致动器,其中包括一个设计和制造硅的驱动器。具有集成的电气和机械互连的读/写磁头微悬架,其目标是下一代30%外形尺寸的微型滑块,以及用于超高磁道密度应用中的电磁背负式微致动器的悬架,两者均利用最新的状态先进的硅微加工制造技术。

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