SUZANA: a 3D CAD tool for anisotropically etched siliconmicrostructures

摘要

This paper reports on a workstation-based simulation module forsilicon anisotropic etching using a cellular automata model. Startingfrom 2D mask data, the program delivers a 3D solid geometric model ofthe etched structure, which can be transferred to other modeling toolslike FEM. The capabilities of the CAD tool are demonstrated by comparingsimulation results to realized microstructures