Modelling of direct laser writing in multilayer absorbing medium

摘要

A model that describes polymerization unit formation in multilayer absorbing medium for direct laser writinghas been proposed. Properties of separate layers including surface roughness, illumination geometry, pulsedlaser source and photosensitive material are parameters of the discussed model. A set of simulations has beencarried out where the inuence of the refractive indexes relation, layer thickness, roughness of the particularlayers with respect to the structuring depth on the structure-model match and reproducibility has been analysedand discussed.