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Laser Scribed Carbon Layers: Process Optimization Sensor Applications

机译:激光划刻碳层:工艺优化和传感器应用

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Justifiably large interest on graphene as an extremely versatile and high-conductivity flexible electronic material led to ongoing push for novel low-cost preparation techniques. Recently it has been demonstrated that polyimide (commercially available as Kapton®) films carbonizes in a surprisingly effective and simple fashion by illumination of medium power $(sim 100$ mW) ns to ms range laser pulses in air. The resulting carbon layers have been shown to be of a random network of 3D and 2D graphitic structures that bestow the final layer sufficient conductivity (1 to 10 W-cm) that can be used in practical applications, especially for sensor and electrochemical applications. However, being a relatively novel process, a detailed account of process optimization and reliability of the conducting structures have not been yet provided, which is provided in this work. Moreover, additional examples of materials responsive to laser scribing process and passive RC-based sensors are also introduced. In addition, we methodically explore typical process parameter space to decouple the complex interplay between laser speed, pulse width, line spacing and laser power for the laser scribe process as well as investigating the longevity and statistical nature of device performance. In particular, we pay attention to humidity conditions and indicate how some of potential weakness can be turned to strengths for sensor applications. Therefore, we report on the optimal processing conditions, reliability of passive device performance and chemical stability of laser scribed carbon electrodes which can be applied to practical sensor development.
机译:石墨烯作为一种用途广泛且具有高导电性的柔性电子材料,引起了人们的极大兴趣,这导致了对新型低成本制备技术的不断推动。最近已证明聚酰亚胺(可作为Kapton商购 ® )薄膜通过在空气中照射中等功率$(\ sim 100 $ mW)ns到ms范围的激光脉冲,以令人惊讶的有效和简单的方式碳化。已显示出所得的碳层具有3D和2D石墨结构的无规网络,该碳网络赋予最终层足够的电导率(1至10 W-cm),可用于实际应用,尤其是传感器和电化学应用。然而,作为一种相对新颖的工艺,尚未提供工艺优化和导电结构的可靠性的详细说明,这是本工作提供的。此外,还介绍了响应激光刻划过程和基于无源RC的传感器的材料的其他示例。此外,我们有条不紊地探索典型的工艺参数空间,以解耦激光刻划过程中激光速度,脉冲宽度,线距和激光功率之间的复杂相互作用,并研究器件性能的寿命和统计性质。特别要注意的是湿度条件,并指出如何将一些潜在的弱点转化为传感器应用的优点。因此,我们报告了可用于实际传感器开发的最佳工艺条件,无源器件性能的可靠性以及激光划刻碳电极的化学稳定性。

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