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Novel Concept for Heterogeneously Integrated High-Speed III-V Photodetector on Silicon Nitride Waveguide

机译：氮化硅波导异质集成高速III-V光电探测器的新概念

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摘要

A novel design for heterogeneously integrated high-speed III-V photodetectors on the Si3N4 platform is proposed. This new approach offers a new platform to merge III-V and Si3N4 for 3D integration. The design is shown to have a high tolerance to bonding and lithography misalignment.

机译：提出了一种针对Si3N4平台上异构集成的高速III-V光电探测器的新颖设计。这种新方法为将III-V和Si3N4进行3D集成提供了一个新平台。该设计显示出对键合和光刻未对准具有很高的容忍度。

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《IEEE Photonics Conference 》|2018年|1-2|共2页
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Shahram Keyvaninia; Patrick Runge; Alexander Schindler; Tobias Beckerwerth; Martin Schell;
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关键词
Optical waveguides; Silicon; Silicon nitride; Photonics; Photodetectors; Bonding; Adiabatic;

机译：光波导;硅;氮化硅;光子学;光电探测器;键合;绝热;

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专利

1. Silicon photodetectors integrated with vertical silicon nitride waveguides as image sensor pixels: Fabrication and characterization [J] . Tut Turgut, Dan Yaping, Duane Peter, Journal of Vacuum Science & Technology . 2014 ,第3期

机译：集成有垂直氮化硅波导作为图像传感器像素的硅光电探测器：制造和表征
2. Low-Loss Silicon Nitride AWG Demultiplexer Heterogeneously Integrated With Hybrid III–V/Silicon Photodetectors [J] . Piels M., Bauters J.F., Davenport M.L., Journal of Lightwave Technology . 2014 ,第4期

机译：低损耗氮化硅AWG多路分解器与III–V /硅混合光电探测器异质集成
3. High-speed waveguide integrated silicon photodetector on a SiN-SOI platform for short reach datacom [J] . Chatterjee Avijit, Saumitra, Sikdar Sujit Kumar, Optics Letters . 2019 ,第7期

机译：SIN-SOI平台上的高速波导集成硅光电探测器，用于短路范围DATACOM
4. Novel Concept for Heterogeneously Integrated High-Speed III-V Photodetector on Silicon Nitride Waveguide [C] . Shahram Keyvaninia, Patrick Runge, Alexander Schindler, IEEE Photonics Conference . 2018

机译：氮化硅波导上的异构集成高速III-V光电探测器的新概念
5. Modeling, Design, and Fabrication of Plasmonic Coupling to a Silicon Nitride Waveguide-Photodetector [D] . Jeong, Jaehoon. 2021

机译：氮化硅波导光电探测器等离子体耦合的建模，设计和制造
6. Multisite silicon neural probes with integrated silicon nitride waveguides and gratings for optogenetic applications [O] . Euijae Shim, Yu Chen, Sotiris Masmanidis, -1

机译：具有集成氮化硅波导和光栅的多站点硅神经探针用于光遗传学应用
7. Heterogeneous integration of III-V photodetectors and laser diodes on silicon-on-insulator waveguide circuits [O] . Roelkens Günther, Brouckaert Joost, Verstuyft Steven, 2006

机译：III-V光电探测器和激光二极管在绝缘体上硅波导电路上的异构集成

Novel Concept for Heterogeneously Integrated High-Speed III-V Photodetector on Silicon Nitride Waveguide

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