首页>
外国专利>
DEPOSITED SI PHOTODETECTORS FOR SILICON NITRIDE WAVEGUIDE BASED OPTICAL INTERPOSER
DEPOSITED SI PHOTODETECTORS FOR SILICON NITRIDE WAVEGUIDE BASED OPTICAL INTERPOSER
展开▼
机译:基于氮化硅波导的光学插入器沉积Si光电探测器
展开▼
页面导航
摘要
著录项
相似文献
摘要
Embodiments herein describe optical interposers that utilize waveguides to detect light. For example, in one embodiment, an apparatus is provided that includes an optical detector having a first layer. The first layer includes at least one of polysilicon or amorphous silicon. The first layer forms a diode that includes a p-doped region and an n-doped region. The apparatus further includes a waveguide optically coupled to the diode and disposed on a different layer than the first layer.
展开▼