In-situ electrical characterization of co-evaporated Zr-V, Zr-Ti and Zr-Co thin getter films during thermal activation

摘要

Sheet resistance of transition metal thin getter films was recorded during activation at 250°C-1h15 by in-situ 4-probes measurement under vacuum. Co-evaporated alloys of Zr-V, Zr-Ti, Zr-Co with different compositions were studied. Results show that resistivity and temperature coefficient of resistance (TCR) are linked and follow the Mooij rule. Several degrees in structure disorder were deduced from the less - pure metals to Zr-Ti then Zr-V - and the highest, i.e. Zr-Co. In case of Zr-Ti, the grain size directly impacts the TCR and the resistivity in as-deposited state, then the oxygen content after activation of the getter at 250°C. For Zr-V and Zr-Co, the amorphous structure has to be taken into account, but their increased structure disorders allow them to sorb more gaseous species than Zr-Ti.