Fine electrode pattern formation by screen-offset printing technique

摘要

We developed a new printing method called "screen-offset printing." This method is the combination of screen printing and transfer printing techniques; ink is first screen-printed on a silicone blanket, and the ink is then transferred from the blanket onto a substrate. Such a procedure allows the formation of patterns with highly rectangular cross sections and finer patterns than can be achieved by conventional screen printing. In the present paper, we explain the details of this process and analyze its efficacy by comparing the experimental results of screen-offset printing with those of conventional screen printing. Further, we introduce a currently developing automated screen-offset printing machine and demonstrate the formation of fine patterns 20 μm in width.