Detection of out-of-plane and in-plane (XYZ) motions of piezoelectric microcantilever by 3D-Laser Doppler Vibrometry

摘要

This paper investigates the vibration analysis of microcantilever in the hundred kHz to MHz range using 3D Vibrometry experimental tool. These microdevices have been actuated by a piezoelectric Aluminum Nitride (AIN) 1.5 ¿¿m-thin layer. Analytical and 3D finite element method (3D-FEM) analysis using Comsol software has been performed to model vibration behavior. Typical numerical simulations and experimental results are presented and discussed. We particularly emphasize on the high detection in-plane and out-of plane motions of the microcantilevers actuated piezoelectrically in air environment. The bending, torsion and lateral modes have been successfully demonstrated. The purpose of this article is to review these latest developments tools in the microcantilever dynamic measurement and present an outlook of the future of these characterization in the next generation microsystems.