HIGH THROUGHPUT FEMTOSECOND-LASER MACHINING OF MICRO-TENSION SPECIMENS

摘要

Femtosecond laser-based machining shows great promise for micro-scale specimen fabrication as this technique combines fast and precise milling while minimizing surface damage. Whereas focused ion beam (FIB) based micromachining techniques achieve milling rates smaller than ～1 μm~3/s, femtosecond lasers can achieve milling rates up on the order of 10~3 μm~3/s, allowing for high throughput specimen fabrication and experimentation. Utilizing only a femtosecond laser and a precison three-axis positioning stage, microtensile specimens were created with gauge widths less than 50 μm from bulk metals.