SPECIMEN MACHINING METHOD, SPECIMEN MACHINING APPARATUS, AND SPECIMEN MACHINING PROGRAM

摘要

PROBLEM TO BE SOLVED: To uniformly machine the side of an observation specimen to a specified depth shape for preventing the shape variation and damage in the observation specimen and saving unneeded machining time regarding a specimen machining method, a specimen machining apparatus, and a specimen machining program for creating the observation specimen by irradiating a specimen with focused ion beams for machining.;SOLUTION: The machining method comprises steps of: specifying the position and length a target observation specimen in the specimen, the machining starting position and the length, and the shape of a machining bottom side from the starting position to the position of the observation specimen; irradiating fixed-length ion beams specified from the far specified starting point of the target observation specimen in the specimen, based on the specification, and irradiating ion beams for machining until the specified shape of the machining bottom side is reached, or the shape of the machining bottom side is reached; and moving to a position close to the next observation specimen for successively repeating machining, when reaching time when the shape of the machining bottom side specified by machining is reached, or when reaching the shape, and completing machining when the position of the observation specimen in which machining is specified is reached.;COPYRIGHT: (C)2005,JPO&NCIPI