THROUGHPUT INFORMATION GENERATION DEVICE FOR SPECIMEN INSPECTION APPARATUS, SPECIMEN INSPECTION APPARATUS, THROUGHPUT INFORMATION GENERATION METHOD FOR SPECIMEN INSPECTION APPARATUS, AND COMPUTER PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a throughput information generation device for a specimen inspection apparatus, the specimen inspection apparatus, throughput information generation method for the specimen inspection apparatus, and a computer program in which throughput information of the specimen inspection apparatus can be generated without causing the specimen inspection to actually implement a specimen measurement.;SOLUTION: A specimen inspection apparatus 1 includes a measuring device 2 and an information processing device 3. The information processing device 3 accepts inputs of a plurality of measuring orders including a plurality of measuring items, creates a schedule for each step included in a measuring operation for each specimen using the specimen inspection apparatus 1 on the basis of the plurality of accepted measuring orders and a specimen measuring order, acquires a throughput value of the specimen inspection apparatus 1 on the basis of the created schedule, and outputs the acquired throughput value.;COPYRIGHT: (C)2012,JPO&INPIT