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Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources

机译：用于高效稀土等离子体极紫外光源的短脉冲CO 2 激光器的研制

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We produced a 3-15-ns CO laser pulse with 10 W/cm for an efficient extreme ultraviolet (EUV) source by rare earth element of Gd. The EUV emission was observed a sharp spectral structure at 6.79 nm.

机译：我们生产了3 W / cm 3-15 ns的CO激光脉冲，功率为10 W / cm，这是一种由Gd的稀土元素产生的高效极紫外（EUV）光源。观察到EUV发射在6.79 nm处具有清晰的光谱结构。

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《IEEE Photonics Conference》|2015年|78-79|共2页
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Amano Reiho; Dinh Thanh-Hung; Sasanuma Atsushi; Arai Goki; Fujii Yusuke; Nanto Kenichiro; Takahashi Akihiko; Nakamura Daisuke; Okada Tatsuo; Makimura Tetsuya; Miura Taisuke; Endo Akira; Mocek Tomas; Dunne Padraig; OSullivan Gerry; Higashiguchi Takeshi;
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carbon compounds; gadolinium; gas lasers; plasma production by laser; spectroscopic light sources; ultraviolet sources; COsub2/sub; COsub2/sub laser pulse; EUV emission; Gd; rare earth element; rare earth plasma extreme ultraviolet sources; sharp spectral structure; time 3 ns to 15 ns; wavelength 6.79 nm; Apertures; Biomedical optical imaging; Fabrication; Optical switches; Production; Stimulated emission;

机译：碳化合物; ga;气体激光器;等离子体产生;光谱光源;紫外光源; CO _{2 ; CO _{2 激光脉冲; EUV发射; Gd;稀土元素;稀土等离子体极端紫外线源;尖锐的光谱结构;时间3 ns至15 ns;波长6.79 nm;光阑;生物医学光学成像;制造;光学开关;生产;受激发射;}}

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专利

1. Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas [J] . Amano Reiho, Thang-Hung Dinh, Sasanuma Atsushi, Japanese journal of applied physics . 2018,第7期

机译：二氧化碳激光的短脉冲持续时间对激光产生的等离子体发出的极紫外线的影响
2. Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas [J] . Tsuyoshi Ando, Shinsuke Fujioka, Hiroaki Nishimura, Applied Physics Letters . 2006,第15期

机译：最佳的激光脉冲持续时间，可有效地从激光产生的锡等离子体中产生极紫外光
3. Formation of a fine-dispersed liquid-metal target under the action of femto- and picosecond laser pulses for a laser-plasma radiation source in the extreme ultraviolet range [J] . Vinokhodov A. Yu., Koshelev K. N., Krivtsun V. N., Quantum electronics . 2016,第1期

机译：在飞秒和皮秒激光脉冲的作用下，在极紫外范围内形成用于激光等离子体辐射源的细分散液态金属靶
4. Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources [C] . Amano Reiho, Dinh Thanh-Hung, Sasanuma Atsushi, IEEE Photonics Conference . 2015

机译：用于高效稀土等离子体极端紫外源的短脉冲CO 2激光的开发
5. Interaction of intense laser pulses with droplet and cluster sources: Application to extreme ultraviolet lithography and plasma waveguide generation. [D] . Sheng, Hua. 2006

机译：强激光脉冲与液滴和团簇源的相互作用：在极端紫外光刻和等离子体波导生成中的应用。
6. Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources [O] . Kentaro Tomita, Yuta Sato, Syouichi Tsukiyama, -1

机译：极紫外光刻光源的激光产生的锡等离子体的电子密度和温度的时间分辨二维分布
7. Short-pulse, extreme-ultraviolet continuum emission from a table-top laser plasma light source [O] . Meighan, Oonagh, Gray, Andrew, Mosnier, Jean-Paul, 1997

机译：台式激光等离子体光源发出的短脉冲，极紫外连续光

Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources

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