The design of SCR-based dual direction ESD protection circuit with low trigger voltage

摘要

In this paper, a SCR(Silicon Controlled Rectifier)-based dual directional ESD protection circuit is proposed. The proposed protection circuit can provide effective protection for ICs against ESD (Electrostatic Discharge) in the both positive and negative directions. To analysis its electrical characteristics, it is verified through the TLP(Transmission Line Pulse) system. Also thermal reliability under high temperature conditions (300K-500K) is verified. In the measurement results, it has trigger voltage of 10.16V and holding voltage of 4.64V. It is shown that the proposed protection circuit has superior characteristics compared to the conventional SCR. In addition, these characteristics make the proposed protection circuit has area efficiency. As a result, the proposed dual directional ESD protection circuit can discharge ESD current in four stress mode (PD, ND, PS, NS) with superior characteristics and reliability.