Irradiation effects of fragment ions of tetradecane on glass surfaces

摘要

Vapors of tetradecane (CH) were ionized by electron bombardment. The generated fragment ions such as CH, CH, and CH ions were separated and accelerated towards glass substrates. The acceleration voltage was adjusted between 1.5 kV and 9 kV. The fluence was 4.0 × 10carbon atoms/cm. Thin films were deposited on the glass substrates by CH- and CH-ion irradiation at an incident energy of 0.42 keV per carbon. Raman spectra measurements showed that DLC films were formed by CH- and CH-ion irradiation with the film thickness being larger in case of CH. On the contrary, for CH-ion irradiation, the glass substrate surface was sputtered at an incident energy of 0.42 keV per carbon. Chemical sputtering occurred by surface reactions of hydrogen and carbon with silicon and oxygen atoms. In addition, the surface characteristics of glass substrates irradiated by CH, CH and CH ions were investigated.