Preparation of Fe-Ga Magnetostrictive Alloy Thin Films by Ion-plating Process

摘要

Very few studies have been reported on preparation of a Fe-Ga alloy with ion plating process. In this study, the Fe-Ga magnetostrictive thin films were prepared by ion plating process with dual vapor source and discussed on effects of excess energy on thin film characteristics. The magnetostriction of film samples increased with increasing of Ga concentration. The excess energy with incidence of ion into the depositing film surface seems to be a key factor for magnetostrictive properties.