Self-referenced, trimmed and temperature-compensated radio frequency (RF) CMOS LC, or harmonic, oscillators (CHOs) are presented as high-accuracy and low-jitter monolithic frequency generators. CHOs are discussed within the context of recent efforts toward replacement of piezoelectric frequency references with silicon MEMS technology. In contrast, CHOs are self-referenced solid-state oscillators which can be fabricated in a standard microelectronic process technology. The CHO architecture and recent implementations are presented. Frequency- and time-domain performance of CHOs is reported and compared to the incumbent piezoelectric oscillators and emerging MEMS-referenced synthesizers. It is shown that CHOs achieve frequency error as low as ±26ppm over 90°C and 1/6th the period jitter of MEMS-referenced synthesizers at the same frequency.
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