Design and fabrication of piezoelectric MEMS

摘要

Lead-zirconate-titanate (PZT) is a typical piezoelectric material with outstanding properties. The preparation behavior of Lead Zirconate Titanate (PZT) composite films comprised of Si, SiO_2, Pt, PZT and Pt for MEMS applications was investigated. The choice of precursors can affect the microstructures and properties of the product, so in this paper we compared the crystallization behavior of PZT films derived from different precursors, stressing the influence of experiment conditions. Dense PZT films were prepared by electrophoretic deposition method (EPD), using commercial powder PZT precursor and metal alkoxide components for the same composition. Some specific comments were underlined about structure of PZT films.