Modeling, Fabrication, and Testing of a Piezoelectric MEMS Vibrational Energy Reclamation Device

摘要

A piezoelectric vibrational energy reclamation device using sol-gel PZT/surface micromachining technology is described for the low power supply of microsystems; converting environmental vibration into useful electrical energy for powering microsystems. The design is appropriate for the power generation of low power remote MEMS sensor network nodes. Electro-mechanical modeling, fabrication, and testing of PZT MEMS are presented. Power generation of 1.54 mW/sq. cm at 700 Hz/50 micrometers amplitude is predicted.