Loss-reduced Rectangular Ring Laser Based on Active Vertical Coupler through Asymmetric Double Shallow Ridge and ICP/ICP Cascade Etching

摘要

Rectangular ring lasers based on an active vertical coupler structure are fabricated through asymmetric double shallow ridge and ICP/ICP cascade etching. 25% reduction of I{sub}(th) and the single mode operation with SMSR 23dB are achieved.