Repeatability of driving characteristics of a polymer-MEMS mirror are transitioned by an environment and time course change. In this study, we propose a method of motion sensing for the purpose of laser scan stable by the active control of a polymer-MEMS mirror. A proposed motion sensor is a coil-type sensor that induces the electric current by an electromagnetic induction and monolithically integrated on the mirror driving by the electromagnetic force. The fabricated mirror made of SU-8 polymer deflects over ±30deg. at low electric current. The measured current induced by the integrated sensor coil is clearly obtained by applying the lock-in detection for signal processing method, and it indicates that the feasibility of amplitude control of the polymer MEMS mirror.
展开▼
