Equipment assessment methodology and automatic management system in automotive semiconductor manufacturing

摘要

With the speedy developing of automotive market, the demand of automotive electronics semiconductor becomes more tremendous. Traditional semi-automatical equipment management method became unsuitable in semiconductor manufacturing. This paper tries to explain how to set up a high efficiency and accuracy assessment methodology on equipment performance to come out best tools on automotive semiconductor manufacturing. And this paper also show the systematical control of this methodology and obvious benefits compared with traditional methods.