A new evaluation and control method on semiconductor risk production manufacturing period

摘要

In this paper, an enhanced risk evaluation and control method on semiconductor Risk Start Agreement (RSA) phase, a risk production period, is reported. Firstly, this method creates a reliability risk evaluation model which defines 5 risk levels with maximal allowed wafer start quantity on RSA phase according to tested data. Then, we also optimize multi-systems (RSA and Order Management System (OMS)) to realize systematical and automatic control on different risk levels. Over 4 years' practice shows this method can be well used in risk management on semiconductor risk production period.