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Operational methods for improving manufacturing control plans: case study in a semiconductor industry

机译:改善制造控制计划的操作方法:半导体行业的案例研究

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摘要

This study presents operational methods which improves tools control plan. To face challenges linked with quality, cost, cycle time, development and environment, semiconductors industries set classical process control methods. However many interactions between product-processes and tools are not exploited in practice for fine tuning controls operations and detecting premises of non conformities occurrences.
机译:这项研究提出了改进工具控制计划的操作方法。为了面对与质量,成本,周期时间,开发和环境有关的挑战,半导体行业设置了经典的过程控制方法。但是,在实践中并未充分利用产品过程和工具之间的许多交互作用来微调控制操作和检测不合格情况的前提。

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