Improvement of bond pad crystal defect by new aluminum pad film stack

摘要

With the rapid development of very large scale integration (VLSI) and continuous scaling in the metal oxide semiconductor field effect transistor (MOSFET), pad corrosion in the aluminum (Al) pad surface has become practical concern in the semiconductor industry. This paper presents a new method to improve the pad corrosion on Al pad surface by using new Al/Ti/TiN film stack. The effects of different Al film stacks on the Al pad corrosion have been investigated. The experiment results show that the Al/Ti/TiN film stack could improve bond pad corrosion effectively comparing to Al/SiON film stack. Wafers processed with new Al film stack were stored up to 28 days and display no pad crystal (PDCY) defects on bond pad surfaces.